Micro and nano photonic devices
The development of nano-photonic devices starts with the design with FEM numerical modelling techniques and is then completed with the manufacturing within the CNOS laboratories. For example, it is possible to realize sensors based on light-matter interaction to trigger plasmonic / photonic resonances, or of planar microwave antennas array. The powerful manufacturing capabilities is due to the versatility of the facilities tools, from electron beam lithography to reactive ion etching techniques, laser ablation and laser polymerization techniques.
The processes offered are characterized by:
- high resolution and precision of the nano structures
- alti rapporti di aspetto ottenibili
- basse contaminazioni